ASTM E1965-98(2009)..
ASTM E2382-04(2012)..
ASTM E2386-04(2011)..
ASTM E252-06(2013)..
ASTM E2666-09
ASTM E2835-11
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ASTM F1372-93(2012)
Standard Test Method for Scanning Electron Microscope (SEM) Analysis of Metallic Surface Condition for Gas Distribution System Components
Automaticky preložený názov:
Štandardná skúšobná metóda pre rastrovací elektrónový mikroskop (SEM) Analýza kovový povrch podmienkou pre plynové distribučnej sústavy, komponenty
NORMA vydaná dňa 1.7.2012
Informácie o norme:
Označenie normy: ASTM F1372-93(2012)
Poznámka: NEPLATNÁ
Dátum vydania normy: 1.7.2012
Kód tovaru: NS-50075
Počet strán: 4
Približná hmotnosť: 12 g (0.03 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Kategórie - podobné normy:
Anotácia textu normy ASTM F1372-93(2012) :
Keywords:
components, contamination, gas distribution, metallic surface condition, SEM analysis, semiconductor processing, surface condition, ICS Number Code 17.040.20 (Properties of surfaces)
Doplňujúce informácie
| Significance and Use | ||
|
4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation. |
||
| 1. Scope | ||
|
1.1 This test method covers the testing of interior surfaces of components such as tubing, fittings, and valves for surface morphology. 1.2 This test method applies to all surfaces of tubing, connectors, regulators, valves, and any metal component, regardless of size. 1.3 Limitations: 1.3.1 This methodology assumes a SEM operator skill level typically achieved over a 12-month period. 1.3.2 This test method shall be limited to the assessment of pits, stringer, tears, grooves, scratches, inclusions, stepped grain boundaries, and other surface anomalies. However, stains and particles that may be produced during specimen preparation should be excluded in the assessment of anomalies. 1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.5 This standard does not
purport to address all of the safety concerns, if any, associated
with its use. It is the responsibility of the user of this standard
to establish appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SRM 20690 SEM Performance Standard |
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