Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method
Automaticky preložený názov:
Štandardné skúšobné metódy pre mikrobiologické kontroly vody použitej pre spracovanie Electron a mikroelektronických súčiastok by priamy tlak Tap vzorkovacej ventil a podľa Presterilized plastového vrecka metódy
NORMA vydaná dňa 1.7.2012
Označenie normy: ASTM F1094-87(2012)
Dátum vydania normy: 1.7.2012
Kód tovaru: NS-49116
Počet strán: 5
Približná hmotnosť: 15 g (0.03 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
contamination, microbiological contamination, microbiological testing, semiconductor processing, water, water distribution system, ICS Number Code 07.100.20 (Microbiology of water)
|Significance and Use|
5.1 These test methods provide a field technique for the bacteriological analysis of electronic process waters. The sampling of these waters and subsequent bacteriological analysis may be critical to electronic product yields. Bacteria can be the prime source of harmful contamination which can significantly reduce the yield of satisfactory microelectronic device production.
5.2 The test methods described here may be used both to monitor the bacteriological quality of water used in microelectronic product processing, and to locate the source of bacterial contamination in a water purification system.
5.3 These test methods are simple field methods, combining sampling and bacteriological analysis techniques that do not require bacteriological laboratory facilities.
5.4 The test methods described employ culture techniques for bacteriological analysis. The user should be aware that such techniques cannot provide a complete count of the total viable bacteria present, since clumps and clusters of bacteria will appear as one single colony when cultured, and since some viable bacteria will not grow under the test conditions used. However, a meaningful comparative bacteria count will be achieved by this method if the culturing of the sample is always done at the same temperature, and for the same period of time. The temperature of incubation should always be at 28 ± 2°C, and the period of incubation should be 48 h (or 72 h if time permits). The period of incubation and temperature should be the same for all comparative studies.
1.1 These test methods cover sampling and analysis of high purity water from water purification systems and water transmission systems by the direct sampling tap and filtration of the sample collected in the bag. These test methods cover both the sampling of water lines and the subsequent microbiological analysis of the sample by the culture technique. The microorganisms recovered from the water samples and counted on the filters include both aerobes and facultative anaerobes.
1.2 Three methods are described as follows:
1.3 This standard does not
purport to address all of the safety concerns, if any, associated
with its use. It is the responsibility of the user of this standard
to establish appropriate safety and health practices and determine
the applicability of regulatory limitations prior to
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