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ASTM E986-97
Standard Practice for Scanning Electron Microscope Beam Size Characterization
Automaticky preložený názov:
Štandardná prax pre SEM pohľadu Beam Rozmer Charakteristika
NORMA vydaná dňa 10.10.1997
Informácie o norme:
Označenie normy: ASTM E986-97
Poznámka: NEPLATNÁ
Dátum vydania normy: 10.10.1997
Kód tovaru: NS-48703
Počet strán: 3
Približná hmotnosť: 9 g (0.02 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Anotácia textu normy ASTM E986-97 :
Keywords:
edge sharpness, electron beam size, E 766, graphite fiber, magnification, NIST-SRM 2069B, performance, SEM, specimen interaction, waveform, ICS Number Code 31.120 (Electronic display devices), 37.020 (Optical equipment)
Doplňujúce informácie
| 1. Scope | ||||
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1.1 This practice provides a reproducible means by which the performance of a scanning electron microscope (SEM) may be characterized. This performance is a measure of the SEM-operator-material combination and is quantified through the measurement of an effective "apparent edge sharpness" for a number of materials, two of which are suggested. This practice requires an SEM with the capability to perform line-scan traces (for example, -deflection waveform generation) for the suggested materials. The range of SEM magnification at which this practice is of utility is from 1000 to 200 000 X. 1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. |
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| 2. Referenced Documents | ||||
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