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ASTM F1261M-96(2003)
Standard Test Method for Determining the Average Electrical Width of a Straight, Thin-Film Metal Line [Metric] (Withdrawn 2009)
Automaticky preložený názov:
Štandardná skúšobná metóda pre priemerný elektrické šírku Straight , Thin - Film Metal Line [ Metric ] ( Withdrawn 2009 )
NORMA vydaná dňa 10.6.1996
Informácie o norme:
Označenie normy: ASTM F1261M-96(2003)
Poznámka: NEPLATNÁ
Dátum vydania normy: 10.6.1996
Kód tovaru: NS-49667
Počet strán: 4
Približná hmotnosť: 12 g (0.03 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Anotácia textu normy ASTM F1261M-96(2003) :
Keywords:
aluminum, electrical interconnect, electrical linewidth, linewidth, metallization, semiconductor, test structure, thin film
Doplňujúce informácie
| 1. Scope | ||||
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1.1 This test method is designed for determining the average electrical width of a narrow thin-film metallization line. 1.2 This test method is intended for measuring thin metallization lines such as are used in microelectronic circuits where the width of the lines may range from micrometres to tenths of micrometres. 1.3 The test structure used in this test method may be measured while still part of a wafer, or part therefrom, or as part of a test chip bonded to a package and electrically accessible by means of package terminals. 1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. |
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| 2. Referenced Documents | ||||
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