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Standard Test Method for Thickness of Epitaxial or Diffused Layers in Silicon by the Angle Lapping and Staining Technique (Withdrawn 2003) (Includes all amendments And changes 8/16/2017).
Automaticky preložený názov:
Štandardná skúšobná metóda pre Hrúbka epitaxního alebo rozptýlené Vrstvy v Silicon uhlom lapovanie a sfarbením Technique ( Withdrawn 2003 )
NORMA vydaná dňa 10.12.2000
Označenie normy: ASTM F110-00a
Poznámka: NEPLATNÁ
Dátum vydania normy: 10.12.2000
Kód tovaru: NS-49130
Počet strán: 4
Približná hmotnosť: 12 g (0.03 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Keywords:
angle lapping, diffused layer, epitaxial layer, etching, fringe count, staining, thickness, ICS Number Code 29.045 (Semiconducting materials)
1. Scope |
This standard was transferred to SEMI (www.semi.org) May 2003 1.1 This test method covers a procedure suitable for interlaboratory comparisons of layer thickness. This test method is applicable for layers of any resistivity so long as the layer differs from the silicon substrate under it either in conductivity type or in resistivity by at least one order of magnitude. The method described is destructive in nature but is more widely applicable than the alternate infrared method, Test Method F95. 1.2 For layers with thicknesses between 1 and 25 µm, an interlaboratory precision as defined in Practice E177, of +(0.15 T + 0.5 µm) (3S) can be achieved where T represents thickness expressed in micrometres. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 8. |
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