Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
Automaticky preložený názov:
Štandardné Guide pre minimalizáciu nežiaducich elektrónového lúča efekty v Auger elektrónové spektroskopie
NORMA vydaná dňa 1.11.2010
Označenie normy: ASTM E983-10
Dátum vydania normy: 1.11.2010
Kód tovaru: NS-48693
Počet strán: 4
Približná hmotnosť: 12 g (0.03 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Auger electron spectroscopy, charging, electron beam, electron beam damage, Auger electron spectroscopy (AES), Electron beam, Electron radiation, Energy deposition--electron radiation, Surface analysis--spectrochemical analysis, Unwanted electron beam effects, ICS Number Code 17.180.30 (Optical measuring instruments)
|Significance and Use|
When electron beam excitation is used in AES, the incident electron beam can interact with the specimen material causing physical and chemical changes. In general, these effects are a hindrance to AES analysis because they cause localized specimen modification (1-4).
With specimens that have poor electrical conductivity the electron beam can stimulate the development of localized charge on the specimen surface. This effect is a hindrance to AES analysis because the potentials associated with the charge can either adversely affect the integrity of Auger data or make Auger data collection difficult (5, 6).
1.1 This guide outlines the origins and manifestations of unwanted electron beam effects in Auger electron spectroscopy (AES).
1.2 Some general guidelines are provided concerning the electron beam parameters which are most likely to produce these effects and suggestions are offered on how to minimize them.
1.3 General classes of materials are identified which are most likely to exhibit unwanted electron beam effects. In addition, a tabulation of some specific materials which have been observed to undergo electron damage effects is provided.
1.4 A simple method is outlined for establishing the existence and extent of these effects during routine AES analysis.
1.5 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
|2. Referenced Documents|
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