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Standard Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps (Withdrawn 2015)
Automaticky preložený názov:
Štandardné praktiky pre Kalibrácia Z - zväčšenie s Atomic Force Microscope na subnanometrových posuvu úrovne pomocou Si ( 111 ) monoatomární Steps ( Withdrawn 2015 )
NORMA vydaná dňa 1.11.2006
Označenie normy: ASTM E2530-06
Poznámka: NEPLATNÁ
Dátum vydania normy: 1.11.2006
Kód tovaru: NS-45532
Počet strán: 6
Približná hmotnosť: 18 g (0.04 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Keywords:
atomic force microscope, atomic steps, AFM, calibration, measurement, silicon, z-magnification, ICS Number Code 19.020 (Test conditions and procedures in general), 71.040.50 (Physicochemical methods of analysis)
Significance and Use | ||
Careful use of this practice can yield calibrated z-magnifications traceable to the SI unit of length with uncertainties (k = 2) of approximately 7 % over height ranges of approximately 1 nm. |
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1. Scope | ||
1.1 This practice covers a measurement procedure to calibrate the z-scale of an atomic force microscope using Si(111) monatomic step height specimens. 1.2 Applications This procedure is applicable either in ambient or vacuum condition when the atomic force microscope (AFM) is operated at its highest levels of z-magnification, that is, in the nanometer and sub-nanometer ranges of z-displacement. These ranges of measurement are required when the AFM is used to measure the surfaces of semiconductors, optical surfaces, and other high technology components. 1.3 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only. 1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. |
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2. Referenced Documents | ||
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