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ASTM D5127-99
Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry
Automaticky preložený názov:
Štandardné Sprievodca pre Ultra čistú vodu používa v Electronics a polovodičový priemysel
NORMA vydaná dňa 10.6.1999
Informácie o norme:
Označenie normy: ASTM D5127-99
Poznámka: NEPLATNÁ
Dátum vydania normy: 10.6.1999
Kód tovaru: NS-29935
Počet strán: 5
Približná hmotnosť: 15 g (0.03 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Anotácia textu normy ASTM D5127-99 :
Keywords:
electronic, microelectron, semiconductor, ICS Number Code 13.060.25 (Water for industrial use), 71.100.99 (Other products of the chemical industry)
Doplňujúce informácie
| 1. Scope | ||||||||||||||||||||||||||||||||||||||||
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1.1 This guide covers the recommendations for the purity of water suitable for use in the electronics and microelectronics industry for purposes such as the washing and rinsing of semiconductor components in cleaning and etching operations, making steam for oxidation of silicon surfaces, photomask preparation, luminescent material deposition, and similar applications relating to the development and fabrication of solid state, thin film, communication lasers, light emitting diodes, photodetector, printed circuit, memory, vacuum tube, or electrolytic devices. 1.2 The values stated in SI units are to be regarded as standard. The inch-pound units given in parentheses are for information only. 1.3 This standard does not purport to address the safety problems associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. |
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| 2. Referenced Documents | ||||||||||||||||||||||||||||||||||||||||
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