ASTM D5127-13

Type E-1

Type E-1.1

Type E-1.2^B

Type E-1.3^B

Type E-2

Type E-3

Type E-4

Linewidth (microns)

1.0–0.5

0.35–0.25

0.18–0.09

0.065–0.032

5.0–1.0

>5.0

—

Resistivity, 25°C (On-line)

18.1

18.2

18.2

18.2

16.5

12

0.5

TOC (μg/L) (on-line for <10 ppb)

5

2

1

1

50

300

1000

On-line dissolved oxygen (μg/L)

25

10

3

10

—

—

—

On-Line Residue after evaporation (μg/L)

1

0.5

0.1

—

—

—

On-line particles/L (micron range)

>0.05 μm

500

 0.05–0.1

1000

200

N/A

—

—

—

 0.1–0.2

1000

350

<100

N/A

—

—

—

  0.2–0.5

500

<100

<10

N/A

—

—

—

 0.5-1.0

200

<50

<5

N/A

—

—

—

 1.0

<100

<20

<1

N/A

—

—

—

SEM particles/L (micron range)

 0.1–0.2

1000

700

<250

N/A

—

—

—

 0.2–0.5

500

400

<100

N/A

3000

—

—

 0.5–1

100

50

<30

N/A

—

10 000

—

 10

<50

<30

<10

N/A

—

—

100 000

Bacteria in CFU/Volume

 100 mL Sample

5

3

1

N/A

10

50

100

 1 L Sample

10

1

10 L Sample

1

Silica – total (μg/L)

5

3

1

0.5

10

50

1000

Silica – dissolved (μg/L)

3

1

0.5

0.5

—

—

—

Anions and Ammonium by IC (μg/L)

 Ammonium

0.1

0.10

0.05

0.050

—

—

—

 Bromide

0.1

0.05

0.02

0.050

—

—

—

 Chloride

0.1

0.05

0.02

0.050

1

10

1000

 Fluoride

0.1

0.05

0.03

0.050

—

—

—

 Nitrate

0.1

0.05

0.02

0.050

1

5

500

 Nitrite

0.1

0.05

0.02

0.050

—

—

—

 Phosphate

0.1

0.05

0.02

0.050

1

5

500

 Sulfate

0.1

0.05

0.02

0.050

1

5

500

Metals by ICP/MS (μg/L)

 Aluminum

0.05

0.02

0.005

0.001

—

—

—

Antimony

0.001

Arsenic

0.001

 Barium

0.05

0.02

0.001

0.001

—

—

—

 Boron^C

0.3

0.1

0.05

0.050

—

—

—

Cadmium

0.010

 Calcium

0.05

0.02

0.002

0.001

—

—

—

 Chromium

0.05

0.02

0.002

0.001

—

—

—

 Copper

0.05

0.02

0.002

0.001

1

2

500

 Iron

0.05

0.02

0.002

0.001

—

—

—

 Lead

0.05

0.02

0.005

0.001

—

—

—

 Lithium

0.05

0.02

0.003

0.001

—

—

—

 Magnesium

0.05

0.02

0.002

0.001

—

—

—

 Manganese

0.05

0.02

0.002

0.010

—

—

—

 Nickel

0.05

0.02

0.002

0.001

1

2

500

 Potassium

0.05

0.02

0.005

0.001

2

5

500

 Sodium

0.05

0.02

0.005

0.001

1

5

1000

 Strontium

0.05

0.02

0.001

—

—

—

Tin

0.010

Titanium

0.010

Vanadium

0.010

 Zinc

0.05

0.02

0.002

0.001

1

5

500

Temperature Stability (K)

±1

Temperature Gradient (K/10 min)

<0.1

Dissolved Nitrogen On-line (mg/L)

8-18

Dissolved Nitrogen Stability (mg/L)

±2

D2791-19

Standard Test Method for On-Line Determination of Sodium in Water

D1129-13(2020)e2

Standard Terminology Relating to Water (Includes all amendments and changes 2/14/2024).

D4192-15

Standard Test Method for Potassium in Water by Atomic Absorption Spectrophotometry

D5996-16

Standard Test Method for Measuring Anionic Contaminants in High-Purity Water by On-Line Ion Chromatography

D5544-16(2023)

Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water

D5542-16

Standard Test Methods for Trace Anions in High Purity Water by Ion Chromatography

D5196-06(2018)

Standard Guide for Bio-Applications Grade Water

D5673-16

Standard Test Method for Elements in Water by Inductively Coupled Plasma´Mass Spectrometry

D5462-21

Standard Test Method for On-Line Measurement of Low-Level Dissolved Oxygen in Water

D4453-17

Standard Practice for Handling of High Purity Water Samples

D4327-17

Standard Test Method for Anions in Water by Suppressed Ion Chromatography

D5391-23

Standard Test Method for Electrical Conductivity and Resistivity of a Flowing High Purity Water Sample

D5173-15(2023)

Standard Guide for On-Line Monitoring of Total Organic Carbon in Water by Oxidation and Detection of Resulting Carbon Dioxide

D4517-15(2023)

Standard Test Method for Low-Level Total Silica in High-Purity Water by Flameless Atomic Absorption Spectroscopy

D4191-15

Standard Test Method for Sodium in Water by Atomic Absorption Spectrophotometry

D3919-15

Standard Practice for Measuring Trace Elements in Water by Graphite Furnace Atomic Absorption Spectrophotometry

D1976-20

Standard Test Method for Elements in Water by Inductively-Coupled Plasma Atomic Emission Spectroscopy

D1193-06(2018)

Standard Specification for Reagent Water

D5997-15

Standard Test Method for On-Line Monitoring of Total Carbon, Inorganic Carbon in Water by Ultraviolet, Persulfate Oxidation, and Membrane Conductivity Detection

F1094-87(1999)

Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method