JIS K0148:2026

Surface chemical analysis-Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

NORMA vydaná dňa 20.1.2026

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Elektronické PDF (NA OTÁZKU)

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The information about the standard:

Designation standards: JIS K0148:2026
Publication date standards: 20.1.2026
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: Other standards
Kategória: Technické normy JIS