
Semiconductor devices - Micro-electromechanical devices -- Part 4: Generic specification for MEMS (Endorsed by AENOR in February of 2011.)
NORMA vydaná dňa 1.2.2011
Designation standards: UNE-EN 62047-4:2010
Publication date standards: 1.2.2011
The number of pages: 23
Approximate weight : 69 g (0.15 lbs)
Country: Spanish technical standard
Kategória: Technické normy UNE