Semiconductor devices - Micro-electromechanical devices -- Part 2: Tensile testing method of thin film materials (IEC 62047-2:2006). (Endorsed by AENOR in January of 2007.)
NORMA vydaná dňa 1.1.2007
Designation standards: UNE-EN 62047-2:2006
Publication date standards: 1.1.2007
The number of pages: 17
Approximate weight : 51 g (0.11 lbs)
Country: Spanish technical standard
Kategória: Technické normy UNE