Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements
NORMA vydaná dňa 12.3.2021
Označenie normy: ISO/TS 21383:2021
Dátum vydania normy: 12.3.2021
Počet strán: 59
Približná hmotnosť: 177 g (0.39 libier)
Krajina: Medzinárodná technická norma
Kategória: Technické normy ISO
Description / Abstract: This document describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.