Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods

The information about the standard:

Designation standards: ISO 24688:2022
Publication date standards: 22.7.2022
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: International technical standard
Kategória: Technické normy ISO

Annotation of standard text ISO 24688:2022 :

Description / Abstract: This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).