Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps
NORMA vydaná dňa 6.12.2023
Označenie normy: ISO 21360-6:2023
Dátum vydania normy: 6.12.2023
Počet strán: 12
Približná hmotnosť: 36 g (0.08 libier)
Krajina: Medzinárodná technická norma
Kategória: Technické normy ISO
Description / Abstract: This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps. It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.