Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials
NORMA vydaná dňa 24.7.2003
Označenie normy: ISO 20341:2003
Dátum vydania normy: 24.7.2003
Počet strán: 5
Približná hmotnosť: 15 g (0.03 libier)
Krajina: Medzinárodná technická norma
Kategória: Technické normy ISO
Description / Abstract: ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.