
Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
NORMA vydaná dňa 14.1.2019
Designation standards: ISO 18516:2019-ed.2.0
Publication date standards: 14.1.2019
The number of pages: 53
Approximate weight : 159 g (0.35 lbs)
Country: International technical standard
Kategória: Technické normy ISO