
Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration
NORMA vydaná dňa 9.5.2022
Designation standards: ISO 14644-9:2022-ed.2.0
Publication date standards: 9.5.2022
The number of pages: 26
Approximate weight : 78 g (0.17 lbs)
Country: International technical standard
Kategória: Technické normy ISO