
Cleanrooms and associated controlled environments — Part 17: Particle deposition rate applications
NORMA vydaná dňa 12.2.2021
Designation standards: ISO 14644-17:2021
Publication date standards: 12.2.2021
The number of pages: 26
Approximate weight : 78 g (0.17 lbs)
Country: International technical standard
Kategória: Technické normy ISO