Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
NORMA vydaná dňa 26.10.2017
Designation standards: ISO 14644-15:2017
Publication date standards: 26.10.2017
The number of pages: 21
Approximate weight : 63 g (0.14 lbs)
Country: International technical standard
Kategória: Technické normy ISO