Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
NORMA vydaná dňa 23.9.2013
Označenie normy: ISO 13424:2013
Dátum vydania normy: 23.9.2013
Počet strán: 46
Približná hmotnosť: 138 g (0.30 libier)
Krajina: Medzinárodná technická norma
Kategória: Technické normy ISO
Description / Abstract: ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.