Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
NORMA vydaná dňa 5.4.2019
Označenie normy: IEC 62047-34-ed.1.0
Dátum vydania normy: 5.4.2019
Počet strán: 16
Približná hmotnosť: 48 g (0.11 libier)
Krajina: Medzinárodná technická norma
Kategória: Technické normy IEC
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.