Semiconductor devices - Micro-electromechanical devices - Part 29: Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
NORMA vydaná dňa 22.11.2017
Označenie normy: IEC 62047-29-ed.1.0
Dátum vydania normy: 22.11.2017
Počet strán: 12
Približná hmotnosť: 36 g (0.08 libier)
Krajina: Medzinárodná technická norma
Kategória: Technické normy IEC
IEC 62047-29:2017(E) specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature. Freestanding thin films of conductive materials are extensively utilized in MEMS, opto-electronics, and flexible/wearable electronics products. Freestanding thin films in the products experience external and internal stresses which could be relaxed even under room temperature during a period of operation, and this relaxation leads to time-dependent variation of electrical performances of the products. This test method is valid for isotropic, homogeneous, and linearly viscoelastic materials.