Electronic engineering materials. Resists for lithography processes. General specifications
NORMA vydaná dňa 1.1.2005
Designation standards: GOST R 52250-2004
Publication date standards: 1.1.2005
The number of pages: 31
Approximate weight : 93 g (0.21 lbs)
Country: Russian technical standard
Kategória: Technické normy GOST