
Micro-electromechanical systems (MEMS) technology—Wafer curvature and cantilever beam deflection test methods for determining residual stresses of MEMS films
NORMA vydaná dňa 29.9.2024
Designation standards: GB/T 44517-2024
Publication date standards: 29.9.2024
Country: Chinese technical standard
Kategória: Technické normy GB