
Practice for determining semiconductor wafer near-edge geometry—Part 3:Sector area flatness(ESFQRESFQDESBIR
NORMA vydaná dňa 2.7.2026
Designation standards: GB/T 43894.3-2026
Note: K dispozici od: únor 2027
Publication date standards: 2.7.2026
Country: Chinese technical standard
Kategória: Technické normy GB