
Semiconductor devices—Micro-electromechanical devices—Part 21: Test method for Poisson""s ratio of thin film MEMS materials
NORMA vydaná dňa 30.7.2026
Designation standards: GB/T 42709.21-2026
Note: K dispozici od: únor 2027
Publication date standards: 30.7.2026
Country: Chinese technical standard
Kategória: Technické normy GB