GB/T 17866-1999

Guideline for programmed defect masks and benchmark procedures for sensitivity analysisof mask defect inspection systems

NORMA vydaná dňa 13.9.1999

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The information about the standard:

Designation standards: GB/T 17866-1999
Publication date standards: 13.9.1999
Country: Chinese technical standard
Kategória: Technické normy GB