
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting.
NORMA vydaná dňa 18.8.2020
Designation standards: BS ISO 16413:2020
Publication date standards: 18.8.2020
The number of pages: 42
Approximate weight : 126 g (0.28 lbs)
Country: British technical standard
Kategória: Technické normy BS
ISBN: 978 0 539 01652 9 Status: Definitive