
Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy.
NORMA vydaná dňa 31.7.2014
Designation standards: BS ISO 14706:2014
Publication date standards: 31.7.2014
The number of pages: 36
Approximate weight : 108 g (0.24 lbs)
Country: British technical standard
Kategória: Technické normy BS
ISBN: 978 0 580 82725 9 Status: Under Review