
Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon.
NORMA vydaná dňa 30.11.2010
Designation standards: BS ISO 12406:2010
Publication date standards: 30.11.2010
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: British technical standard
Kategória: Technické normy BS
ISBN: 978 0 580 66874 6 Status: Confirmed