
Semiconductor devices - Micro-electromechanical devices. Part 52: Biaxial tensile testing method for stretchable MEMS.
NORMA vydaná dňa 10.3.2026
Designation standards: BS IEC 62047-52:2026
Publication date standards: 10.3.2026
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: British technical standard
Kategória: Technické normy BS
ISBN: 978 0 539 33390 9 Status: Definitive