ASTM F1513-99(2011)

Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications (Withdrawn 2020)

NORMA vydaná dňa 1.6.2011

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Informácie o norme:

Označenie normy: ASTM F1513-99(2011)
Poznámka: NEPLATNÁ
Dátum vydania normy: 1.6.2011
Počet strán: 2
Približná hmotnosť: 6 g (0.01 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM

Anotácia textu normy ASTM F1513-99(2011) :

Keywords:
aluminum, coating, evaporation, sputtering, targets, thin films, vacuum coating, Aluminum electrical conductors (semiconductors), Electronic materials/applications--specifications, Electronic thin-film applications--specifications, Evaporators/evaporation--specifications, Sputtering process/targets--specifications, Targets, Vacuum electronic applications, ICS Number Code 31.200 (Integrated circuits. Microelectronics)