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ASTM F847-94(1999)

Standard Test Methods for Measuring Crystallographic Orientation of Flats on Single Crystal Silicon Wafers by X-Ray Techniques

NORMA vydaná dňa 1.1.1999

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Informácie o norme:

Označenie normy: ASTM F847-94(1999)
Poznámka: NEPLATNÁ
Dátum vydania normy: 1.1.1999
Počet strán: 8
Približná hmotnosť: 24 g (0.05 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM

Anotácia textu normy ASTM F847-94(1999) :

Keywords:
Angular deviation, Crystal lattice structure, Fiducial flats, Laue method, Nondestructive evaluation (NDE)-Laue method, Single-crystal silicon, Surface analysis-electronic components/devices, X-ray diffraction, crystallographic orientation of flats on single crystal silicon, slices/wafers, by x-ray techniques, test,, Silicon semiconductors-slices/wafers, wafers/slices-crystallographic orientation of flats on single crystals,, by x-ray techniques, test