
Test Method for Detection of Oxidation Induced Defects in Polished Silicon Wafers (Withdrawn 1998)
Designation standards: ASTM F416-94
Note: NEPLATNÁ
The number of pages: 11
Approximate weight : 33 g (0.07 lbs)
Country: American technical standard
Kategória: Technické normy ASTM
Keywords:
ICS Number Code 29.045 (Semiconducting materials)