ASTM F2113-01

Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications

NORMA vydaná dňa 10.6.2001

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The information about the standard:

Designation standards: ASTM F2113-01
Note: NEPLATNÁ
Publication date standards: 10.6.2001
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Kategória: Technické normy ASTM

Annotation of standard text ASTM F2113-01 :

Keywords:
electronics, purity analysis, purity grade, sputtering, target, thin film