Standard Test Methods for Analyzing Organic Contaminants on Silicon Wafer Surfaces by Thermal Desorption Gas Chromatography (Withdrawn 2003) (Includes all amendments And changes 8/16/2017).
NORMA vydaná dňa 7.10.1999
Označenie normy: ASTM F1982-99e1
Poznámka: NEPLATNÁ
Dátum vydania normy: 7.10.1999
Počet strán: 7
Približná hmotnosť: 21 g (0.05 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Keywords:
atomic emission detector (AED), flame ionization detector (FID), flame photometric detector(FPD), gas chromatography, mass spectrometer (MS), nitrogen/phosphorus thermionic detector(NPD), organic contamination, organophosphorus compounds, phosphorus selective detector, silicon wafer surfaces thermal desorption, ICS Number Code 29.045 (Semiconducting materials)