Standard Practice for Calibrating a Scanning Surface Inspection System Using Monodisperse Polystyrene Latex Spheres Deposited on Polished or Epitaxial Wafer Surfaces (Withdrawn 2003)
NORMA vydaná dňa 1.1.1996
Označenie normy: ASTM F1620-96
Poznámka: NEPLATNÁ
Dátum vydania normy: 1.1.1996
Počet strán: 6
Približná hmotnosť: 18 g (0.04 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Keywords:
Calibration-semiconductor analysis instrumentation, Multipoint size calibration, Particle counting, Particle size calibration, Polystyrene latex spheres (PSL), PSL (polystyrene latex spheres), Scanning surface inspection system (SSIS), Silicon semiconductors-slices/wafers, SSIS (scanning surface inspection system), scanning surface inspection system (SSIS)-size calibration, using, monodisperse polystyrene latex spheres (PSL) deposited on