Standard Test Method for Measuring Surface Sodium, Aluminum, Potassium, and Iron on Silicon and EPI Substrates by Secondary Ion Mass Spectrometry (Withdrawn 2003)
NORMA vydaná dňa 10.5.1998
Designation standards: ASTM F1617-98(2002)
Note: NEPLATNÁ
Publication date standards: 10.5.1998
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Kategória: Technické normy ASTM
Keywords:
aluminum, iron, potassium, silicon, SIMS, sodium, surface contamination, ICS Number Code 77.040.30 (Chemical analysis of metals)