ASTM F1617-98

Standard Test Method for Measuring Surface Sodium, Aluminum, Potassium, and Iron on Silicon and EPI Substrates by Secondary Ion Mass Spectrometry

NORMA vydaná dňa 10.5.1998

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The information about the standard:

Designation standards: ASTM F1617-98
Note: NEPLATNÁ
Publication date standards: 10.5.1998
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Kategória: Technické normy ASTM

Annotation of standard text ASTM F1617-98 :

Keywords:
aluminum, iron, potassium, silicon, SIMS, sodium, surface contamination