ASTM F1530-94

Standard Test Method for Measuring Flatness, Thickness, and Thickness Variation on Silicon Wafers by Automated Noncontact Scanning

NORMA vydaná dňa 1.1.1994

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Informácie o norme:

Označenie normy: ASTM F1530-94
Poznámka: NEPLATNÁ
Dátum vydania normy: 1.1.1994
Počet strán: 7
Približná hmotnosť: 21 g (0.05 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM

Anotácia textu normy ASTM F1530-94 :

Keywords:
Flatness-semiconductors, Noncontact technique, Nondestructive evaluation (NDE)-semiconductors, Probe methods, Silicon semiconductors-slices/wafers, Silicon semiconductors-slices/wafers, Thickness-semiconductors, Thickness variation, Wafers, silicon wafers-flatness/thickness/thickness variation, by automated, noncontact scanning, test, ICS Number Code 29.045 (Semiconducting materials)