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ASTM F1527-02

Standard Guide for Application of Certified Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon (Withdrawn 2003)

NORMA vydaná dňa 10.7.2002

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Informácie o norme:

Označenie normy: ASTM F1527-02
Poznámka: NEPLATNÁ
Dátum vydania normy: 10.7.2002
Počet strán: 15
Približná hmotnosť: 45 g (0.10 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM

Anotácia textu normy ASTM F1527-02 :

Keywords:
certified reference materials, control chart, eddy current gage, four-point probe method, mercury probe, reference materials, resistivity, resistivity reference wafer, semiconductor, sheet resistance, silicon wafers, SPC, spreading resistance probe, Standard Reference Materials, ICS Number Code 29.045 (Semiconducting materials)