Standard Guide for Application of Silicon Standard Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon
NORMA vydaná dňa 10.6.2000
Označenie normy: ASTM F1527-00
Poznámka: NEPLATNÁ
Dátum vydania normy: 10.6.2000
Počet strán: 15
Približná hmotnosť: 45 g (0.10 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Keywords:
Calibration-semiconductor analysis instrumentation, Control chart, Eddy current gage, Four-point probe method, Mercury probe, Probe methods-four-point probe, Probe methods-spreading resistance probe, Reference materials (RM), Resistance (electrical)-semiconductors, Resistivity reference wafer, Sheet resistance, Silicon semiconductors, Silicon semiconductors-slices/wafers, SPC, Spreading resistance probe, Standard reference materials (SRM)