ASTM F1438-93(1999)

Standard Test Method for Determination of Surface Roughness by Scanning Tunneling Microscopy for Gas Distribution System Components

NORMA vydaná dňa 10.6.1999

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Informácie o norme:

Označenie normy: ASTM F1438-93(1999)
Poznámka: NEPLATNÁ
Dátum vydania normy: 10.6.1999
Počet strán: 10
Približná hmotnosť: 30 g (0.07 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM

Anotácia textu normy ASTM F1438-93(1999) :

Keywords:
Gas distribution systems, Microscopic examination-electronic materials, Roughness, Scanning tunneling microscopy, Semiconductor clean rooms, Stainless steel-gas distribution systems, Surface analysis-electronic components/devices, Texture, Topography, Tunneling, gas distribution system components-surface roughness, by scanning, tunneling microscopy, test, ICS Number Code 17.040.20 (Properties of surfaces)