Standard Test Method for Determining Net Carrier Density in Silicon Wafers by Miller Feedback Profiler Measurements With a Mercury Probe

Informácie o norme:

Označenie normy: ASTM F1393-92(1997)
Poznámka: NEPLATNÁ
Dátum vydania normy: 1.1.1992
Počet strán: 7
Približná hmotnosť: 21 g (0.05 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM

Anotácia textu normy ASTM F1393-92(1997) :

Keywords:
Density-electronic applications, Depth profiling, Diodes, Electrical conductors-semiconductors, Mercury probe, Miller feedback profiler, Net carrier density (in semiconductors), Polished silicon wafers/slices, Probe methods, Resistance and resistivity (electrical)-semiconductors, Schottky barrier diode, Silicon-semiconductor applications, Single-crystal silicon, Voltage, net carrier density profiles in epitaxial/polished bulk silicon wafers,