Standard Test Method for Determining Net Carrier Density in Silicon Wafers by Miller Feedback Profiler Measurements With a Mercury Probe (Withdrawn 2003)
NORMA vydaná dňa 10.12.2002
Designation standards: ASTM F1393-02
Note: NEPLATNÁ
Publication date standards: 10.12.2002
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: American technical standard
Kategória: Technické normy ASTM
Keywords:
depth profile, epitaxial wafers, mercury probe, miller feedback method, net carrier density, silicon, ICS Number Code 29.045 (Semiconducting materials)