Standard Test Method for Energy Dispersive X-Ray Spectrometer (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components
NORMA vydaná dňa 10.6.1999
Označenie normy: ASTM F1375-92(2005)
Poznámka: NEPLATNÁ
Dátum vydania normy: 10.6.1999
Počet strán: 4
Približná hmotnosť: 12 g (0.03 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Keywords:
Electron microscopy, Gas distribution systems, Scanning electron microscope (SEM), Semiconductor clean rooms, Spectrometry-x-ray emission, Stainless steel-gas distribution systems, Surface analysis-metals/alloys, analysis of metallic surface condition for gas distribution system, components, using energy dispersive x-ray spectrometry (EDX), test, ICS Number Code 17.040.20 (Properties of surfaces)