ASTM F1367-98(2011)

Standard Specification for Chromium Sputtering Targets for Thin Film Applications (Withdrawn 2020)

NORMA vydaná dňa 1.6.2011

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The information about the standard:

Designation standards: ASTM F1367-98(2011)
Note: NEPLATNÁ
Publication date standards: 1.6.2011
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Kategória: Technické normy ASTM

Annotation of standard text ASTM F1367-98(2011) :

Keywords:
chromium, sputtering, targets, Chromium electronic materials/applications, Chromium sputtering targets, Electronic materials/applications--specifications, Sputtering process/targets--specifications, Targets, ICS Number Code 25.220.40 (Metallic coatings)