ASTM F1366-92(1997)e1

Standard Test Method for Measuring Oxygen Concentration in Heavily Doped Silicon Substrates by Secondary Ion Mass Spectrometry (Includes all amendments And changes 3/2/2021).

NORMA vydaná dňa 1.1.1992

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The information about the standard:

Designation standards: ASTM F1366-92(1997)e1
Note: NEPLATNÁ
Publication date standards: 1.1.1992
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Kategória: Technické normy ASTM

Annotation of standard text ASTM F1366-92(1997)e1 :

Keywords:
FTIR, oxygen, secondary ion mass spectometry, silicon