Standard Test Method for Determining the Average Electrical Width of a Straight, Thin-Film Metal Line [Metric]
NORMA vydaná dňa 1.1.1996
Designation standards: ASTM F1261M-96
Note: NEPLATNÁ
Publication date standards: 1.1.1996
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Kategória: Technické normy ASTM
Keywords:
aluminum, electrical interconnect, electrical linewidth, linewidth, metallization, semiconductor, test structure, thin film, ICS Number Code 31.080.01 (Semi-conductor devices in general)